[10a-N204-1~12] CS.10 Code-sharing Session of 6.5 & 7.6

[10a-N204-8] Oxygen kinetic energy dependence of the satellite peak observed in O1s photoelectron spectra for Si(001)2×1 surface oxidation at room temperature

〇Akitaka Yoshigoe¹, Yasutaka Tsuda¹, Aki Tominaga¹, Tetsuya Sakamoto¹, Shuichi Ogawa², Yuji Takakuwa³ (1.JAEA Materials Sciences Research Center, 2.Tohoku Univ. International Center for Synchrotron Radiation Innovation Smart, 3.Tohoku Univ. microSIC)

Keywords:oxidation of Silicon surface, synchrotron radiation photoelectron spectroscopy, molecular beams

The study of the adsorption process of oxygen molecules on Si(001)2×1 surfaces is important for the understanding of oxidation reactions. In this study, we report the results of synchrotron radiation real-time photoemission spectroscopy observation of the surface under oxygen molecular beam irradiation using the surface experimental station of JAEA BL23SU at SPring-8. The peak associated with molecular adsorption states was observed in the O1s photoelectron spectrum during molecular beam irradiation. The changes in chemical states and electronic structures with oxidation time will be presented.