[10a-N306-1~11] 17.2 Graphene

△ [10a-N306-6] Characterization of Electrical Properties for Graphene with THz-TDS Ellipsometry

〇(M2)Hiroki Suzuki¹, Takashi Fujii^1,2, Shinichiro Mouri¹, Toshiyuki Iwamoto², Yuki Ueda³, Shigeya Naritsuka³, V.C. Agulto⁴, Makoto Nakajima⁴, Tsutomu Araki¹ (1.Ritsumeikan Univ., 2.PNP, 3.Meijo Univ., 4.Osaka Univ.)

Keywords:graphene, tera hertz, time domain spectroscopy

We have established a technique to determine the electrical properties of bulk semiconductors (GaN, InN, etc.) by spectroscopic analysis using electromagnetic waves in the THz frequency band.
We are now aiming to apply this technique to graphene, a two-dimensional material.
In this paper, we report the results of non-contact, non-destructive determination of sheet resistance, carrier density, scattering time, and mobility of graphene using THz-TDS ellipsometry, which is expected to have industrial applications.