The 82nd JSAP Autumn Meeting 2021

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Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[10a-N401-1~9] 7.2 Applications and technologies of electron beams

Fri. Sep 10, 2021 9:00 AM - 11:30 AM N401 (Oral)

Takafumi Ishida(Nagoya University), Aso Kohei(北陸先端大)

10:30 AM - 10:45 AM

[10a-N401-6] Focal depth extension in ADF-STEM using an electron Bessel beam

〇Takafumi Ishida1, Masahiro Ohtsuka1, Makoto Kuwahara1, Koh Saitoh1, Tadahiro Kawasaki2 (1.Nagoya Univ., 2.JFCC)

Keywords:electron microscope