Development of ultrafast SEM by vertical illuminating configuration with femtosecond laser

Yuuga Emoto; Yuki Yamamoto; Yusuke Arashida; Yoshiya Kishibe; Keishi Akada; Shoji Yoshida; Masaki Hada; Jun-ichi Fujita

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[10a-N401-1~9] 7.2 Applications and technologies of electron beams

Fri. Sep 10, 2021 9:00 AM - 11:30 AM N401 (Oral)

Takafumi Ishida(Nagoya University), Aso Kohei(北陸先端大)

11:15 AM - 11:30 AM

[10a-N401-9] Development of ultrafast SEM by vertical illuminating configuration with femtosecond laser

〇(M2)Yuuga Emoto¹, Yuki Yamamoto¹, Yusuke Arashida¹, Yoshiya Kishibe¹, Keishi Akada¹, Shoji Yoshida¹, Masaki Hada¹, Jun-ichi Fujita¹ (1.Univ. of Tsukuba)

Keywords:Electron Microscopy

We have developed a ultrafast SEM for observation of sub-picosecond surface dynamics by a pump-probe method that combines conventional SEM and a femtosecond laser.