The 82nd JSAP Autumn Meeting 2021

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Oral presentation

CS Code-sharing session » 【CS.1】 Code-sharing Session of 2.3 & 7.5

[10a-N402-1~9] CS.1 Code-sharing Session of 2.3 & 7.5

Fri. Sep 10, 2021 9:00 AM - 11:30 AM N402 (Oral)

Noriaki Toyoda(Univ. of Hyogo), Satoshi Ninomiya(Univ. of Yamanashi)

9:45 AM - 10:00 AM

[10a-N402-4] Investigation of surface activated bonding by gas cluster ion beam irradiation in reactive gas atmosphere.

〇Soichi Hanahara1, Masaya Takeuchi1, Noriaki Toyoda1 (1.Univ Hyogo)

Keywords:gas cluster ion beam