[10a-N402-1~9] CS.1 Code-sharing Session of 2.3 & 7.5

[10a-N402-7] Sputtered Volumes Produced by Vacuum Electrospray Droplet Ion Beams obtained from capillaries with different inner diameter

〇Mikihiro Kawase¹, Satoshi Ninomiya¹, Lee Chuin Chen¹, Kenzo Hiraoka¹ (1.Univ. of Yamanashi)

Keywords:cluster ion beam, secondary ion mass spectrometry

We have studied charged droplets produced by electrospray of aqueous solutions as a massive cluster beam for secondary ion mass spectrometry (SIMS) to much improve the ionization efficiencies. In the previous studies, the prototype of a vacuum electrospray droplet ion (V-EDI) gun was installed in a semi-commercial time-of-flight SIMS system, and the secondary ion yields produced by the V-EDI beams obtained from capillaries with different inner diameter were measured for several organic compounds. In this study, the size distributions of the V-EDI beams and sputtered volumes produced by the beams will be evaluated by the impact marks measured by a scanning probe microscope.