[10a-S301-1~10] 8.1 Plasma production and diagnostics

[10a-S301-3] Measurement of Electron Temperature and Electron Density by Emission Spectroscopy in Ar&N₂ Mixed Atmospheric Pressure Non-Equilibrium Plasma

〇(M2)Ryo Ishizuka¹, Atsushi Nezu^2,3, Hiroshi Akatsuka^3,1 (1.Tokyo Tech, 2.Open Facility Center, Tokyo Tech, 3.IIR, Tokyo Tech)

Keywords:plasma, emission spectroscopy

While atmospheric pressure non-equilibrium plasma is currently expected to have a wide range of applications, there are few reports on the measurement of "electron temperature" and "electron density", which are indispensable for the simulation and control of radical density. In particular, with an eye on industrial applications, measurement of plasma mixed with reactive gas is desired. Therefore, in this study, we try to measure the electron temperature and electron density of Ar / N₂ mixed atmospheric pressure non-equilibrium plasma by optical emission spectroscopy.