The 82nd JSAP Autumn Meeting 2021

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[10p-N101-1~20] 15.4 III-V-group nitride crystals

Fri. Sep 10, 2021 1:00 PM - 6:30 PM N101 (Oral)

Munetaka Arita(Univ. of Tokyo), Ryuji Katayama(Osaka Univ.), Ryota Ishii(Kyoto Univ.)

4:00 PM - 4:15 PM

[10p-N101-12] Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching

〇Koji Yoneta1, Taiju Kudo1, Umito Kurabe1, Akihiko Kikuchi1,2,3 (1.Sophia Univ., 2.Sophia Photonics Research Center, 3.Sophia Semiconductor Research Institute)

Keywords:Nitride semiconductor