[10p-N102-1~11] 15.4 III-V-group nitride crystals

[10p-N102-3] Substrates Off-Cut Dependence on the Crystallinity of the a-plane AlN Prepared by Sputtering and Annealing Method

〇Kota Shibutani¹, Kenjiro Uesugi^2,3, Shiyu Xiao², Kanako Shojiki¹, Shigeyuki Kuboya², Toru Akiyama¹, Hideto Miyake^1,3 (1.Grad. Sch. of Eng., Mie Univ., 2.SPORR, Mie Univ., 3.Grad. Sch. of RIS, Mie Univ.)

Keywords:r-plane sapphire, a-plane AlN, Annealing