The 82nd JSAP Autumn Meeting 2021

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[10p-N102-1~11] 15.4 III-V-group nitride crystals

Fri. Sep 10, 2021 1:30 PM - 4:30 PM N102 (Oral)

Yusuke Hayashi(Osaka Univ.), Kenjiro Uesugi(Mie Univ.)

2:45 PM - 3:00 PM

[10p-N102-6] Study on Si Doping in GaN for Nitride Light Emitting Devices Using Sputtering

〇Yuto Kaku1, Dong-Pyo Han1, Atsushi Suzuki2, Kazumasa Niwa2, Yukimi Jinno1, Satoshi Kamiyama1, Tetsuya Takeuchi1, Motoaki Iwaya1 (1.Meijo Univ., 2.E&E Co.Ltd.)

Keywords:sputtering, Si doping