[10p-N104-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [10p-N104-10] DLTS analysis of RPD-induced defects using Bayesian optimization

〇(D)Tomohiko Hara¹, Yoshio Ohshita¹ (1.Toyota Tech. Inst.)

Keywords:DLTS, Bayesian optimization, TCO

Reactive Plasma Deposition (RPD) is widely used for transparent conductive film deposition in carrier selective contact solar cells. However, this process induces several types of defects at the interface and near the interface between the passivation film and the silicon crystal, which reduces the carrier lifetime. In this study, we characterize the RPD-induced defects by regression analysis of DLTS spectra using Bayesian optimization. The result suggests that the defects with energy levels in the mid-gap and which may become recombination centers are formed.