The 82nd JSAP Autumn Meeting 2021

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Oral presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[10p-N104-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

Fri. Sep 10, 2021 1:00 PM - 6:15 PM N104 (Oral)

Hitoshi Sai(AIST), Atsushi Masuda(Niigata Univ.)

4:45 PM - 5:00 PM

[10p-N104-14] Characterization of TOPCon structure using sputtered a-Si:H layers

〇Takumi Miyamoto1, Yuta Shiratori1,2, Shinsuke Miyajima1 (1.Tokyo Tech., 2.JSPS research Fellow (DC1))

Keywords:sputtering, TOPCon structure, SiH4 free technology