[10p-N202-1~19] 15.5 Group IV crystals and alloys

△ [10p-N202-11] Triaxial Strain Evaluation for Carbon-doped Silicon Nanowire using X-ray Reciprocal Space Mapping (II)

〇Kazutoshi Yoshioka¹, Gai Ogasawara¹, Kirito Cho¹, Yuta Ito¹, Sho Sugawa¹, Ichiro Hirosawa^2,3, Takeshi Watanabe⁴, Ryo Yokogawa^1,3, Atsushi Ogura^1,3 (1.Meiji Univ., 2.SAGA-LS, 3.MREL, 4.JASRI)

Keywords:Carbon-doped silicon, Nanowaire, Reciprocal space mapping