SiN nanopore membranes with thicknesses of less than 10 nm fabricated using the SiO<sub>2</sub> sacrificial layer process

Presentation information

Oral presentation

12 Organic Molecules and Bioelectronics » 12.6 Nanobiotechnology

Fri. Sep 10, 2021 1:30 PM - 6:00 PM N207 (Oral)

Koji Sumitomo(Univ. of Hyogo), Hitoshi Asakawa(Kanazawa Univ.), Akahori Rena(日立研開)

1:45 PM - 2:00 PM

〇Itaru Yanagi¹, Ken-ichi Takeda¹ (1.Hitachi R&D)

Keywords:nanopore, membrane, thin film