[10p-N304-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

△ [10p-N304-5] Characterization of Electronic Charged States of High Density Self-aligned Si-based Quantum Dots Evaluated with AFM/Kelvin Prove Technique

〇(D)Yuki Imai¹, Katsunori Makihara¹, Noriyuki Taoka¹, Akio Ohta¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)

Keywords:Si-based quantum dots, AFM/KFM, Charge distribution