[10p-N305-1~18] 3.7 Laser processing

[10p-N305-11] Real-Time Temperature Measurement during Laser Processing

〇Hideyuki Takada¹, Dai Yoshitomi¹, Aiko Narazaki¹ (1.AIST)

Keywords:laser processing, temperature measurement, ultrashort pulse laser

In ultrashort pulsed laser processing, which is one of the most popular non-thermal processing methods, the temperature at the processing point has a significant impact on the productivity and the quality of the process. Therefore, if it is possible to accurately grasp the temperature at the processing point, which fluctuates with each laser pulse injection, more precise process and quality control can be realized. Therefore, we have developed a high-speed and high-sensitivity real-time temperature measurement system that can follow the rapid temperature change near the processing point in laser processing, and investigated the real-time measurement of the temperature during processing.