2:30 PM - 2:45 PM
[10p-N305-5] Laser imaging of SiO2 nanoparticles ablated by UV pulsed laser in the gas phase.
Keywords:laser ablation, nanoparticle, low-k film
Oral presentation
3 Optics and Photonics » 3.7 Laser processing
Fri. Sep 10, 2021 1:30 PM - 6:30 PM N305 (Oral)
Takeshi Tsuji(Shimane Univ.), Tsuyoshi Yoshida(National Defense Academy of Japan), Hidehiko Yashiro(AIST)
2:30 PM - 2:45 PM
Keywords:laser ablation, nanoparticle, low-k film