1:45 PM - 2:00 PM
[10p-N322-2] Optical Emission Spectroscopy of Deep Oscillation Magnetron Sputtering
Keywords:pulsed sputtering, sputtering plasma, optical emission spectroscopy
In high power pulsed magnetron sputtering (HPPMS), which is one of the ionization physical vapor deposition method, deep oscillation magnetron sputtering (DOMS) applying a pulsed power that consists of comb-like waveform has attracted attention as a diamond-like carbon coating method with arc-free conditions. In this study, time-resolved measurements for optical emission of DOMS plasma were investigated to get information on the atomic and sputtering processes, which are the keys to the control of sputtering deposition in DOMS.