The 82nd JSAP Autumn Meeting 2021

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[10p-N323-1~12] 13.3 Insulator technology

Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)

Keisuke Yamamoto(Kyushu Univ.), Yuuichiro Mitani(Tokyo City University)

1:00 PM - 1:15 PM

[10p-N323-1] Study of deposition temperature dependence of GeO2 films by CVD method

〇Takehito Shibuya1, Hirotaka Iino1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.TUAT)

Keywords:Ge-based semiconductor