[10p-N405-1~11] CS.7 3.15 シリコンフォトニクス・集積フォトニクス、4.2 Photonics Devices, Photonic Integrated Circuit and Silicon Photonicsのコードシェアセッション

▲ [10p-N405-6] Suspended ladder BG silicon sensor for high amplitude sensitivity

〇(D)Siim Heinsalu¹、Yuichi Matsushima¹、Hiroshi Ishikawa¹、Katsuyuki Utaka¹ (1.Waseda Univeristy)

キーワード：Sensors, Bragg grating, SOI

Using silicon photonics there have been many various effective biosensors developed. Especially, Bragg grating (BG) structures seem effective for high sensitivity, and furthermore, introduction of multi slots in the sub-wavelength BG, so-called an MS-SW BG sensor, exhibited a high wavelength sensitivity of about 735 nm/RIU. Further improvements of sensitivity were reported by the suspended structure. But, at the same time, introduction of suspended saw and even suspended complex saw structures lacked the fabrication reproducibility. Here, a simper structure such as a ladder with suspension is proposed for high-amplitude sensitivity.