[10p-S203-1~21] 6.3 Oxide electronics

[10p-S203-12] Low-temperature growth of LiCoO₂ thin films on Al substrates

〇(M1)Kazuki Ohta¹, Iwao Kawayama¹, Riki Kataoka², Yasushi Maeda², Toshiya Doi¹ (1.Kyoto Univ., 2.AIST)

Keywords:LiCoO2, low temperature growth, biaxial orientation

All-solid-state thin-film lithium-ion batteries are expected to be used in biomedical devices and IC chips, etc. However, the crystallization of LiCoO2 (LCO), a typical cathode material, required the growth temperature of about 600 °C. The deposition process at such a high temperature limits the materials and structures of the substrate, anode, and solid electrolyte. In this study, we succeeded in crystallizing LCO thin films on Al substrates at a substrate temperature of less than 100 °C.