[10p-S203-1~21] 6.3 Oxide electronics

[10p-S203-13] All-solid-state amorphous thin-film Lithium-ion batteries on polymer substrates

〇Masayasu Yoshida¹, Kenta Tsuji¹, Isaku Kanno¹ (1.Kobe Univ.)

Keywords:amorphous thin-film, all-solid-state li-ion battery, sputtering

In this study, we fabricated all-solid-state amorphous thin-film lithium-ion batteries (TF-LIBs) on glass and polyimide (PI) substrates by rf-sputtering method at room temperature. The multilayer of the TF-LIBs was composed of Li₃PO₄-added V₂O₅, LiPON, and Si as the cathode, electrolyte, and anode, respectively. We measured charge-discharge properties and cycle characteristics of the TF-LIBs on glass and PI substrates.