3:15 PM - 3:30 PM
[10p-S301-8] Development of magnetron sputtering device with rotational magnets for effective target-utilization
Keywords:plasma, target-utilization, magnetron sputtering device
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
Fri. Sep 10, 2021 2:00 PM - 4:30 PM S301 (Oral)
3:15 PM - 3:30 PM
Keywords:plasma, target-utilization, magnetron sputtering device