[11a-N101-1~9] 15.4 III-V-group nitride crystals

[11a-N101-4] HVPE Growth of AlN on Stripe Patterned AlN Templates

〇Hayato Oka¹, Ryuto Okunada¹, Shiyu Xiao², Kanako Shojiki¹, Kenjiro Uesugi^2,3, Shigeyuki Kuboya², Takao Nakamura^3,4, Hideto Miyake^1,3 (1.Grad. Sch. of Eng., Mie Univ., 2.SPORR, Mie Univ., 3.Grad. Sch. of RIS., Mie Univ., 4.IIS, The Univ. of Tokyo)

Keywords:AlN, HVPE, patterned template