[11a-N105-1~5] Deciphering and designing the functional orders exhibiting specific and unique functions of non-crystalline and crystalline solids

[11a-N105-2] Solid Phase Crystallization of Semiconductors: A Review on Charactristics and Potential

〇Tanemasa Asano¹ (1.Kyushu Univ.)

Keywords:semiconductor, silicon, solid phase epitaxial growth

A review is presented to share knowledge on solid phase epitaxial growth of silicon in terms of impacts of major physical and chemical parameters and mechanism of several methods to perform low temperature growth.