Proposal of Pupil Divided Optics with Magnification Correction

Presentation information

Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

Sat. Sep 11, 2021 9:00 AM - 11:45 AM N106 (Oral)

Toshihiro Somekawa(Inst. for Laser Tech.), Koyama Yuya(Chiba Institute of Technology)

9:45 AM - 10:00 AM

〇Eiji Arima¹, Yuta Urano¹, Shunichi Matsumoto², Toshifumi Honda¹ (1.Hitachi, Ltd. R&D Group, 2.Hitachi High-Tech Corp.)

Keywords:Optical inspection, Lens array