[11a-N302-1~11] 17.3 Layered materials

△ [11a-N302-8] Elucidation of Incubation Time Decision Mechanism for the Growth of Monolayer WS₂

〇(M1)Yuta Iwamoto¹, Xiaoming Qiang¹, Toshiro Kaneko¹, Toshiaki Kato¹ (1.Tohoku Univ.)

Keywords:2D material, In-situ monitoring, Growth mechanism

In this study, in-situ monitoring chemical vapor deposition (CVD) system has been developed to reveal the growth mechanism of tungsten disulfide (WS₂), known as an atomically thin layered material. Based on the systematic investigations, it is found that the incubation time for the nucleation of WS₂ is decided by following time-temperature transformation diagram, where balance between diffusion of precursors and driving force for the lateral growth decides the timing of nucleation.