The 82nd JSAP Autumn Meeting 2021

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[11a-N304-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N304 (Oral)

Kenji Yamaguchi(QST), Kosuke Hara(Univ. of Yamanashi)

9:30 AM - 9:45 AM

△ [11a-N304-3] Evaluation of post-annealed As-doped BaSi2 films

〇Sho Aonuki1, Shunsuke Narita1, Kaoru Toko1, Takashi Suemasu1 (1.Univ. Tsuukuba)

Keywords:semiconductor, barium disilicide