[11a-N304-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

[11a-N304-5] Effect of face-to-face annealing for improving the quality of Mg₂Si thin film prepared by thermal evaporation

〇Kaisei Sato¹, Satoru Miyamoto¹, Kazuhiro Gotoh¹, Yasuyoshi Kurokawa¹, Takashi Itoh¹, Noritaka Usami¹ (1.Nagoya Univ.)

Keywords:Mg2Si, semiconducting silicides, Thermal evaporation