The 82nd JSAP Autumn Meeting 2021

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Oral presentation

13 Semiconductors » 13.7 Compound and power devices, process technology and characterization

[11a-N305-1~11] 13.7 Compound and power devices, process technology and characterization

Sat. Sep 11, 2021 9:00 AM - 12:00 PM N305 (Oral)

Masashi Kato(Nagoya Inst. of Tech.)

9:15 AM - 9:30 AM

[11a-N305-2] Evaluation of activation for p-type GaN by channeled implantation

〇Atsushi Suyama1, Hitoshi Kawanowa1, Hideaki Minagawa1, Masahiko Aoki1 (1.Ion Technology Center Co., Ltd)

Keywords:Channeled Implantation, GaN, Activation