[11a-N321-1~11] 3.7 Laser processing

△ [11a-N321-4] Control of Laser Ablation Morphology Utilizing the Effect of Non-linear Propagation in Air

〇Ryohei Yamada¹, Haruyuki Sakurai², Kuniaki Konishi¹, Norikatsu Mio¹, Junji Yumoto¹, Makoto Kuwata-Gonokami¹ (1.Graduate school of Science, The Univ. of Tokyo, 2.ISSP, The Univ. of Tokyo)

Keywords:femtosecond laser ablation, non-linear optical effect, laser ablation of metal

In the case of sub-100 fs laser ablation, the spatial intensity distribution of the laser pulse is modulated due to Kerr self-focusing and ionization of air, which changes the morphology of the ablated craters. In this study, we focused on the positional dependence of the fluence distribution of the laser pulse on the optical axis direction. We clarified the relationship between the fluence distribution predicted from the numerical calculation and the morphology of the ablated craters when the copper sample is placed at the position corresponding to the calculated fluence distribution.