[11a-N324-1~11] 2.1 Detection Devices

[11a-N324-7] Development of a sub-10 nm resolution X-ray imaging detector equipped with scintillator solid-immersion optics

〇Takashi Kameshima^1,2, Takaki Hatsui^2,1 (1.JASRI, 2.RIKEN)

Keywords:super-resolution, X-ray, scintillator

We are planning to apply a super-localization technique to an indirect X-ray imaging detector to exceed the diffraction-limited performance. It is found that the imaging optics equipped with GAGG:Ce solid-immersion lens can resolve 100 nm line&space patterns and detect a single 10 keV photon as a point spread image consisting of 415 scintillation photons. The image reconstructed with the localized centers of the point spreads can resolve 4.8 nm line&space patterns. In this presentation, we will report the development plan and its progress.