[11a-N401-1~5] 7.3 Micro/Nano patterning and fabrication

[11a-N401-4] Fabrication of freestanding two-stage through-electrode films using the transfer method

〇Atsuhiro Furuta¹, Shin Hiwasa², Jun Taniguchi¹ (1.Tokyo Univ. of sci, 2.Autex Inc.)

Keywords:nano imprint, silver ink, through-electrode

In recent years, flexible devices such as sensors and solar cells fabricated using the printing method have been attracting attention. These devices can be manufactured at low cost, and because they are flexible, they can be easily bent and many functions can be mounted on a single substrate. In addition, in terms of device integration methods, through-hole electrodes are attracting attention for their superiority in terms of miniaturization and high density due to their three-dimensional structure. In this study, we investigated the fabrication method of freestanding through-electrode films.