The 82nd JSAP Autumn Meeting 2021

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Symposium (Oral)

Symposium » (Open Symposium) Critical Roles of Evolving Semiconductors in Evolution of AI

[11a-S101-1~11] (Open Symposium) Critical Roles of Evolving Semiconductors in Evolution of AI

Sat. Sep 11, 2021 9:50 AM - 12:10 PM S101 (Oral)

Kay Domen(Yushi Sozo)

11:35 AM - 11:45 AM

[11a-S101-8] The path from beaker experiments to the commercialization of semiconductor cleaning equipment

〇Manabu Okutani1 (1.SCREEN SPE USA, LLC)

Keywords:semiconductor cleaning equipment