The 82nd JSAP Autumn Meeting 2021

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Symposium (Oral)

Symposium » Deciphering and designing the functional orders exhibiting specific and unique functions of non-crystalline and crystalline solids

[11p-N105-1~8] Deciphering and designing the functional orders exhibiting specific and unique functions of non-crystalline and crystalline solids

Sat. Sep 11, 2021 1:30 PM - 5:15 PM N105 (Oral)

Toshiyuki Kawaharamura(Kochi Univ. of Tech.), Kohei Fujiwara(Tohoku Univ.)

2:30 PM - 3:00 PM

[11p-N105-3] Fabrication of ZnO films by Solid Phase Crystallization of Amorphous ZnON films and Their Impact as Seed Layers

〇Naho Itagaki1, Zhiyuan Shen1, Yuta Mido1, Hisato Yabuta2 (1.ISEE, Kyushu Univ., 2.CPNE, Kyushu Univ.)

Keywords:solid phase crystallization, ZnO, ZnON