[11p-N205-1~12] CS.5 Code-sharing Session of 3.11 & 3.12

[11p-N205-2] Photothermal heating and anisotropic thermal conductivity of high-aspect-ratio titanium nitride nanostructures

〇Satoshi Ishii^1,2,3, Makoto Higashino⁴, Shinya Goya⁴, Shkondin Shkondin⁵, Katsuhisa Tanaka⁴, Tadaaki Nagao^1,6, Osamu Takayama⁵, Shunsuke Murai⁴ (1.NIMS, 2.Univ. of Tsukuba, 3.JST-PRESTO, 4.Kyoto Univ., 5.DTU, 6.Hokkaido Univ.)

Keywords:photothermal heating, titanium nitride, heat conduction

High-aspect-ratio tube and trench made of titanium nitride having 400-nm periodicities were fabricated by the atomic layer deposition technique using the silicon mold. The heat transfer analyses using the effective thermal conductivities agreed well to the experiments. The high heating efficiency of the TiN tube was attributed to extremely low effective thermal conductivity of the horizontal components.