[11p-N207-1~13] 3.15 Silicon photonics and integrated photonics

[11p-N207-8] Investigation of optical phase modulation using HfO₂ based ferroelectric

〇Kazuma Taki¹, Naoki Sekine¹, Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.The Univ. of Tokyo)

Keywords:Pockels

In order to cope with the exponential growth of communication volume within the Internet and data centers, there is a strong need for high-capacity and power-saving optical fiber communications. For this reason, large-scale optical integrated circuits based on Si photonics are becoming more and more important, and among them, the most important research issue is to increase the efficiency and speed of Si optical modulators. In this work, we fabricated an optical modulator with HfO2-based ferroelectric film, Hf_0.5Zr_0.5O₂ (HZO), deposited on Si optical waveguide, and the evaluated the optical phase modulation by voltage application.