[11p-N301-1~8] Diversification of piezoelectrics - From sensors and actuators to 5G and IoT technologies -

[11p-N301-5] Asymmetric piezoelectric response of epitaxial (K, Na)NbO₃ thin films grown on Si substrates

〇Yoshiyuki Kawata¹, Kiyotaka Tanaka¹, Sang-Hyo Kweon¹, Goon Tan², Isaku Kanno¹ (1.Kobe Univ., 2.Osaka pref. Univ.)

Keywords:KNN, epitaxial, piezoelectric thin film

In this study, we deposited epitaxial KNN thin films on Si substrates by rf-sputtering method and examined their polarization dependence of piezoelectric properties. The KNN thin films showed obvious asymmetric piezoelectric butterfly curves; upward polarized KNN thin films showed larger and more stable piezoelectric characteristics than that of KNN thin films with downward polarization.