Material Design of Piezoelectric AlN Thin Films based on First-principles calculation

Yoshiki Iwazaki

Presentation information

Symposium (Oral)

Symposium » Diversification of piezoelectrics - From sensors and actuators to 5G and IoT technologies -

[11p-N301-1~8] Diversification of piezoelectrics - From sensors and actuators to 5G and IoT technologies -

Sat. Sep 11, 2021 1:30 PM - 5:15 PM N301 (Oral)

Hironori Fujisawa(Univ. of Hyogo), Ichiro Fujii(Yamanashi Univ.)

4:15 PM - 4:45 PM

[11p-N301-7] Material Design of Piezoelectric AlN Thin Films based on First-principles calculation

〇Yoshiki Iwazaki¹ (1.TAIYO YUDEN)

Keywords:First-principles calculation, AlN, Piezoelectric

We will report on the dopant design of AlN piezoelectric thin films used in FBAR (Film Bulk Acoustic Resonator) by using first-principles calculations. In addition to the calculation results, we will show the characteristics improvement results that were actually confirmed through the fabrication of the resonator, and also show the results that support the solid solution of the dopants to the Al site through analysis of TEM, XAFS, etc.