[11p-N321-1~8] 3.7 Laser processing

△ [11p-N321-1] Development of laser interference processing of nanofilms using a femtosecond laser

〇Taito Miwa^1,2, Naohiro Kadoguchi^1,2, Yuuki Uesugi², Yuuichi Kozawa², Shunichi Sato² (1.Tohoku Univ., 2.IMRAM, Tohoku Univ.)

Keywords:laser micro processing, nanofilms processing, femtosecond laser

We have developed a laser processing method that can process nanofilms without a supporting substrate. In this method, multiple femtosecond laser beams branched by a spatial light modulator are interfered on the sample surface. This enables us to process a relatively large area more quickly and easily than the focused ion beam method for thin film processing. In this study, we have succeeded in two-dimensional interference processing of various patterning by changing the number of incident lights. In this lecture, we will report the details.