[11p-N321-1~8] 3.7 Laser processing

△ [11p-N321-3] The mechanism of optical attenuation length in ultrafast laser induced structural changes

〇Tatsunori Shibuya¹, Kazuyuki Sakaue², Hiroshi Ogawa¹, Daisuke Satoh¹, Thanh-Hung Dinh³, Masahiko Ishibo³, Masahito Tanaka¹, Masakazu Washio⁴, Takeshi Higashiguchi⁵, Masaharu Nishikino³, Yohei Kobayashi², Ryunosuke Kuroda¹ (1.AIST, 2.UTokyo, 3.QST, 4.Waseda Univ., 5.Utsunomiya Univ.)

Keywords:laser processing, extreme ultraviolet, optical attenuation length