[11p-N321-1~8] 3.7 Laser processing

△ [11p-N321-6] Evaluation of optical properties of nanoparticles fabricated from impurity-doped 4H-SiC substrates using pulsed laser ablation

〇Mitsuki Ikeda¹, Jun Ishihara¹, Kensuke Miyajima¹ (1.Tokyo University of Sci.)

Keywords:ablation, laser processing, photoluminescence

We have previously demonstrated that 3C-SiC nanoparticles are mainly produced by submerged laser ablation (LA) targeting 4H-SiC substrates. In LA, the crystal structure which differed from the substrate seems to be produced, since the crystal is rebuilt by the atom discharged from the substrate. In this study, we fabricated nanoparticles using LA on a 4H-SiC substrate doped with impurities. If the crystal is reconstructed, it is expected that even if the target substrate has a large amount of impurities, the nanoparticles produced by LA will not be affected.