[11p-N321-1~8] 3.7 Laser processing

△ [11p-N321-7] The effect of pulse repetition rate for periodic micro structure formation on silicone rubber surface by ArF laser irradiation

〇Tsuyoshi Yoshida¹, Masayuki Okoshi¹ (1.NDA)

Keywords:VUV laser, surface modification

In previous reports, periodic micro-swelling structure were fabricated on silicone surface by ArF laser irradiation. In this study, the effect of pulse repetition rate on the growth of micro-swelling structure was investigated, and the positive correlation was seen between sub-second pulse interval and height of swelling structure. We will discuss the effect of the pulse interval of laser irradiation on the growth of swelling of silicone rubber surface.