Quantitative Measurements of Adhesion Forces and Degree of Swelling at Surfaces of the PVA Brush for Semiconductor Wafer Cleaning by AFM in Liquids.

Yoshihiko Asano; Takahiko Ikarashi; Kazuki Miyata; Keisuke Miyazawa; Megumi Uno; Chikako Takatoh; Takeshi Fukuma

Presentation information

Oral presentation

12 Organic Molecules and Bioelectronics » 12.2 Characterization and Materials Physics

[11p-N323-1~13] 12.2 Characterization and Materials Physics

Sat. Sep 11, 2021 1:30 PM - 5:30 PM N323 (Oral)

Toyokazu Yamada(Chiba Univ.), Ryo Yamada(Osaka Univ.), Akihiko Fujii(Osaka Univ.)

5:00 PM - 5:15 PM

[11p-N323-12] Quantitative Measurements of Adhesion Forces and Degree of Swelling at Surfaces of the PVA Brush for Semiconductor Wafer Cleaning by AFM in Liquids.

〇Yoshihiko Asano¹, Takahiko Ikarashi¹, Kazuki Miyata¹, Keisuke Miyazawa¹, Megumi Uno², Chikako Takatoh², Takeshi Fukuma¹ (1.Kanazawa Univ., 2.EBARA Corp.)

Keywords:Atomic Force Microscopy, PVA

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