[11p-S201-1~8] Thin film / surface physics research trends and future prospects -The 50th anniversary of Thin film and surface physics division-

[11p-S201-3] Diversifying Trends in Integrated Circuits and informatics as supporting system

〇Toyohiro Chikyow¹, Hiori Kino¹, Takahiro Nagata¹, Shinjiro Yagyu¹ (1.NIMS)

Keywords:semiconductor, digital transformation, informatics

ntegrated circuits have been a field in which digital transformation (DX) has progressed from a fast stage. In the future, not only miniaturization but also the development of new materials such as two-dimensional materials and the development of devices using these materials will be required. In order to achieve this, it will be a challenge to realize a system for material development, process development, and prototype device fabrication using cyber space and real space. In this talk, I will review the history of DX in semiconductor devices to date, and look ahead to the trends of DX in materials design using data science, progress in high-throughput materials synthesis and evaluation, process informatics, and new device development.