[11p-S401-1~18] 1.6 Ultrasonics

△ [11p-S401-14] Resonance Property of Shear-horizontal Surface Acoustic Wave
on New Langasite-type Piezoelectric Single Crystal

〇Ryoto Suzuki¹, Masashi Suzuki¹, Shoji Kakio¹, Noritoshi Kimura² (1.Univ. of Yamanashi, 2.Piezo Studio Inc)

Keywords:New Langasite-type Piezoelectric Single Crystal, Shear-horizontal Surface Acoustic Wave, Temperature Properties

The resonance property, including temperature properties, of Love-type SH-waves on new langasite-type single crystal (CTGS) with Al-based interdigital transducer (IDT) were measured and compared with those of Au-based IDT. It was experimentally clarified that good resonance properties were obtained even when Al-IDT were used. In addition, it was experimentally clarified that the zero-frequency temperature coefficient (TCF) of Au can be achieved by choosing an appropriate Au film thickness, and the zero TCF for Al-IDT can be expected by setting the CTGS cut angle to around 155°