[11p-S401-1~18] 1.6 Ultrasonics

[11p-S401-8] Fundamental study of inverse gas chromatography for bended surface structure of stainless-steel tube using trace moisture ball SAW sensor

〇Toshihiro Tsuji¹, Hideyuki Fukushi², Toru Oizumi², Nobuo Takeda² (1.Tohoku Univ., 2.Ball Wave Inc.)

Keywords:surface acoustic wave sensor, trace moisture, adsorption/desorption

The surface morphology of bended stainless-steel tube for highly pure gas distribution system affects the adsorption/desorption characteristics, but practical measurement method has not been established. In this study, the detection is tried by the inverse gas chromatography using the ball SAW trace moisture sensor. As a result of using the probe gas with a concentration of 1000ppbv for electropolished stainless-steel tube with 1/4 in. O. D. and 500 mm length, significant difference was observed between as-purchased and bended tubes.