[11p-S401-1~18] 1.6 Ultrasonics

[11p-S401-9] Examination of recognition method of wireless SAW sensor using mass load effect

〇Naoki Horikawa¹, Jun Kondoh¹ (1.Shizuoka Univ.)

Keywords:Surface acoustic wave

By using surface acoustic waves (SAW), wireless sensors can be realized. So far, impedance load SAW sensors combined with impedance change type sensors have been studied. The identification of a general SAW sensor uses the response amplitude of the reflective electrode, but there are various problems. Therefore, in this study, we propose an identification method based on phase change using the mass loading effect. In this paper, we have made the necessary consideration for the actual identification using the mass loading effect.