[12a-N403-1~7] 11.4 Analog applications and their related technologies

[12a-N403-3] Control of physical properties of YBCO thin film with helium ion microscope technology

〇Tetsuro Misawa¹, Riku Inoue^1,3, Shigeyuki Ishida¹, Shinichi Ogawa¹, Yukinori Morita¹, Hiroshi Eisaki¹, Shin-ichi Uchida^1,2, Taichiro Nishio³, Chiharu Urano¹ (1.AIST, 2.Univ. of Tokyo, 3.Tokyo Univ. Science)

Keywords:High temperature superconductor, Josephson junction, Helium ion microscope

Josephson junctions are essential for the quantum voltage standard and metrology. Although Josephson junctions using Nb and NbN as superconducting materials have been well established, the fabrication of Josephson junctions with high-T_c cuprate superconductors has not yet been fully established because fabricating a high-quality tunnel barrier layer is difficult due to the short coherence length. In this paper, we present control of physical properties of YBCO thin films with the helium ion microscopy (HIM) toward the fabrication of YBCO Josephson devices with HIM.