[12a-S301-1~11] 6.2 Carbon-based thin films

△ [12a-S301-7] Spin characterization of NV ensembles on high-concentration nitrogen-doped CVD diamonds

〇(B)Mayu Ueda¹, Kyosuke Hayasaka¹, Kyotaro Kanehisa¹, Taisuke Kageura^1,3, Sora Kawai¹, Kazuki Otani¹, Yuki Ueda¹, Yuta Saito¹, Takashi Tanii¹, Shinobu Onoda², Jyunichi Isoya⁴, Shinpei Enomoto⁵, Shozo Kono⁵, Hiroshi Kawarada^1,5 (1.Waseda Univ., 2.QST, 3.NIMS, 4.Univ. of Tsukuba, 5.ZAIKEN)

Keywords:semiconductor, NV center, diamond

NV ensembles in diamond are expected to be applied to magnetic sensing. In particular, the magnetic sensitivity is improved by creating high-concentration NV center while maintaining a long T₂. High-concentration nitrogen-doped diamond was prepared by the CVD method, and a nitrogen concentration of 5 × 10²⁰ cm^-3 was obtained. In addition, we attempted to increase the density of the NV ensemble by performing electron irradiation using a transmission electron microscope. The density of the NV center increased from 1.0 × 10¹⁶ cm^-3 to a maximum of 2.6 × 10¹⁷ cm^-3 with or without electron irradiation.